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Crystal Engineering Laboratory
- Realization of Next-Generation Semiconductor Devices
- Diamond Crystal Growth
- Innovative Technology Development for Single Crystal Substrate Processing
Professor / AIDA Hideo
Professor Aida is a dedicated researcher. He provides thoughtful research guidance to each student individually, allowing us to pursue our research with confidence. He also respects student autonomy and grants discretion over research content, making it an ideal environment for students who wish to pursue their own interests.
Research Content
We are conducting research and development on crystal substrates using next-generation semiconductor materials such as SiC, GaN, and diamond. While these materials offer superior performance compared to conventional silicon, they are extremely hard and chemically stable, making it difficult to establish efficient processing technologies. Therefore, we aim to contribute to the practical application of these materials through the development of substrate processing technologies. Regarding diamond, obtaining the large single crystals required for semiconductor devices is challenging. Therefore, we are also focusing on crystal growth technology and working to produce high-quality, large substrates.
Measurement room
A Day in the Lab
Our lab is equipped with many state-of-the-art instruments for experiments and measurements. If you need additional equipment for your experiments, you can propose it to the professor, and it will be introduced as needed. Furthermore, you receive direct feedback from the professor during weekly seminars. Additionally, several researchers are based in the student lounge, so if you encounter difficulties in your research, you can get precise advice. This creates an ideal environment that makes you eager to pursue research.
Student dormitory
Thesis Subjects
- (M)Effects of Grooved Platen on Slurry Introduction and Removal Rate Distribution in CMP for GaN Substrate.
- (M)Verification of Oxidation Effects on GaN Substrates lrradiated with Atomospheric Pressure Plasma Using X-ray Photoeiectron Spectroscopy.
The number of
PhD Graduates
0
Major employers of Graduates
- Fujikoshi Machinery Corp
- CITIZEN MACHINERY CO.,LTD
- TDK Corporation
- KYODO KY-TEC CORP
- ROHM Co.,Ktd.
- Sanoh Industrial Co.,Ltd
- CMK CORPORATION
- Renesas Electronics Corporation
- A.L.M.T.Corp
- Tokyo Electron Ltd
