We are developing novel microfabrication techniques using laser lights, and applying them for fabricating microdevices. For example, we have variety of research topics, a research about fabricatin technique for micro 3D structures in air by using femtosecond laser pulses. The fabrication dynamics was analyzed time-resolved measurement by using a pump-probe technique. We also working on creating devices to observe micro cells. At last, Microfabrication technology is not only focus on miniaturization but also utilizing of "size effect" that generated in micro and nano scales.

Laser system and micro device